Owner's manual
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Yokogawa Manuals
Air equipment
Single Channel Oxygen Analyzer System ZR22/ZR402
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IM 11M13A01-02E
2-21
2. Specifications
d
Piping Diagram
CHECK
OUT
ZERO GAS IN
AIR IN
Instrument air Approx.
1.5 l/min.
flow
meter
flow
meter
REF
OUT
*2
*2
EV1
EV2
*
2 Needle valv
e is supplied as accessory with flow meter
.
Air set
F2.7E.EPS
1
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...
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