Manual

  <1.Outline>
1-1
IM 11M10B01-01E
1. Outline
TheOX400isahighlyaccurateandreliablelowconcentrationzirconiaoxygenanalyzerthatis
capable of measuring a wide range of concentrations, from 0-10 ppm up to 0-100 vol% O
2
. This is
thelatestoxygenanalyzerfromYokogawa,anditsdevelopmentwasbasedonthecompany’slong
experienceandstrongtrackrecordwiththistechnology.
Aproprietarynewthin-lmdepositiontechnologywasusedinthezirconiasensorthatcreatesa
molecular bond between the zirconia element and the platinum layer. This prevents separation,
enables a reduction in sensor size and ensures a high-speed response and long life.
The OX400 can be used to control and monitor various semiconductor applications, and to control
environment, air leakage into inert gas, and other processes.
Features
Longlifeandhigh-speedresponse
• ThankstotheuseofYokogawa’sproprietarynewthin-lmdepositiontechnology,thesensorhas
three times the lifespan of those used in our earlier products.
• A cylindrical sensor design facilitates the replacement of measurement gases, thereby helping to
assure a high-speed response.
Highperformanceandhighreliability
• Superiorrepeatabilityandlinearityevenatlowoxygenconcentrations
• Either pump or aspirator sampling can be selected, depending on the application.
Built-infunctionsandavarietyofself-diagnosisfunctions
• Comes with multi selector, auto range, partial range,andpumpon/offfunctions
• A variety of self-diagnosis functions are provided that detect malfunctions such as heater
temperature error, temperature sensor burnout, and sensor resistance value error.
Superior maintainability
• The sensor can be replaced on-site.
• Compact and lightweight for easy installation.
Applications
• Oxygenconcentrationcontrolinsemiconductor-relateddiffusionanddryingfurnacesandinLCD
manufacturing processes
• Oxygenconcentrationcontrolinsolderpotowandre-owovens,andgloveboxesusedin
electronics manufacturing, and in gas production processes
• Oxygenconcentrationmeasurementstopreventdustexplosionsduringpowdertransfer