Owner's manual

ii
IM 11M12A01-04E
<Introduction>
This manual consists of twelve chapters. Please refer to the reference chapters for installation, opera-
tion and maintenance.
Chapter
Outline
Relates to
Installation Operation Maintenance
1. Overview Equipment models and system conguration
examples
2. Specications Standard specication, model code (or part number),
dimension drawing for each equipment
3. Installation Installation method for each equipment
4. Piping Examples of piping in three standard system
congurations
5. Wiring Wiring procedures such as “Power supply wiring”,
“output signal wiring” or others
6. Components Major parts and functions are described
7. Startup Basic procedure to start operation of EXAxt ZR.
Chapter 7enables you to operate the equipment
immediately.
8. Detailed Data
Setting
Details of key operations and displays
9. Calibration Describes the calibration procedure required in the
course of operation.
10. Other
Functions
Other functions described
11. Inspection
and
Maintenance
How to conduct maintenance of EXAxt ZR and
procedures for replacement of deteriorated parts
12. Troubleshoot-
ing
This chapter describes measures to be taken when an
abnormal condition occurs.
CMPL (parts list) User replaceable parts list
: Read and completely understand before operating the equipment.
: Read before operating the equipment, and refer to it whenever necessary.
: Recommended to read at least once.