Instruction Manual

<6. Maintenance>
6-26
IM 11B08A01-01E
(9) Remove the conversion couplings attached to the IN and OUT side of the vortex tube at the
adapter coupling section.
(10) Install a new vortex tube in the reverse order of steps (3) to (7).
When reinstalling the adapter coupling and conversion coupling, always use a sealing tape.
(11) Confi rm that there are no leaks.
(12) Install the front panel which has been removed in step (4).
<Replacement Parts>
K9803HE
Mounting Bracket
Mounting Screw (two)
Mounting Bracket
Vortex Tube Assembly
Vortex Tube
Regulator Connecting Tube (two)
Mounting Screw
Couplings
Adapter
Couplings
Regulator
Connection Tube
Figure 6.24 Vortex Tube
(5) Hydrogen Limiting Unit
The hydrogen limiting unit comprises of a mass-fl ow controller and pneumatic valve. This unit
can regulate or completely shut off the fl ow of hydrogen. The fl ow of hydrogen is regulated to
300 ml/min by the mass-fl ow controller. In addition, if the system cannot maintain the required
protection (if the internal pressure cannot be maintained at the specifi ed level), it actuates the
pneumatic valve per signal from the main unit and shut off the hydrogen supply.
(1) Stop the operation. (See “3.3.4 Stopping operation” for this procedure).
(2) Stop the supply of power.
CAUTION
The isothermal oven is extremely hot after turning off the power immediately. Keep the purging
air supplied for more than an hour after turning off the power. Keep hands away from the oven
components.
2nd Edition : May 11, 2012-00