Instruction Manual

<6. Maintenance>
6-22
IM 11B08A01-01E
(5) Remove the couplings connected to the inlet (IN) and outlet (OUT) of the regulator. See
Figure 6.19. Label the couplings with “IN” and “OUT” for ease of identifi cation later.
Note
Remove any metal fl akes off the couplings.
(6) Remove the stem lock.
(7) Remove the mounting locknut and the regulator.
(8) Install a new regulator in the reverse order of steps (5) through (7).
(9) Start supplying the carrier gas and other gases and perform a leak test around the
couplings.
(10) Set the carrier gas pressure to the value indicated in the operation data. Adjust and set the
pressure by loosening the stem lock nut and rotating the stem. After completing the setting,
fi x the stem with the locknut.
(11) Close the isothermal oven door and the cover of the pressure/fl ow control section.
IMPORTANT
After the temperature of the isothermal oven in the oven unit becomes substantially stable, set
the pressure of the carrier gas again according to the Operation data.
<Replacement Parts>
Applicable Temperature Range O-ring Material
K9409AW 180 °C or less Viton
K9409AV 225 °C or less Kalrez
IN
OUT
Isothermal Oven Door
Regulator for
Carrier Gas
Regulator for Carrier Gas
Outside Wall of
the Pressure Control Chamber
Inside Wall of
the Isothermal Oven
Nut
Stem Lock
Couplings
Figure 6.19 Regulator for carrier gas
2nd Edition : May 11, 2012-00