Instruction Manual

<5. EtherLCD>
5-94
IM 11B08A01-01E
In some SYSs, when a valve is set to Yes and other SYS is selected, **** is displayed, “Already
set in other SYS” is displayed in the second line below and it cannot be set again even though it
is selected.
• Any SYS number that does not exist in F5 (SYS#) cannot be entered.
• Any oven number that does not exist in F6 (Oven#) cannot be entered.
 Detector Setup
Press F5 (SYS#), and “SYS No.” is displayed in the second line below.
Use the numeric keypad to input the number and press the Set/Ent key, and it is refl ected in the
second line above and the SYS contents of the number is shown.
Press F6 (Oven#), and “Oven No.” is displayed in the second line below.
Use the numeric keypad to select the number and press the Set/Ent key, and it is refl ected in the
second line above, and the valve set of the specifi ed oven is completed.
Point a cursor to a detector and press the Set/Ent key, and options are displayed in the second
line below.
Select either Yes or NA.
Not installed detectors are displayed as ----.
When any of the Not installed detectors is used by other SYS, **** is displayed.
In some SYSs, when a detector is set to Yes and other SYS is selected, **** is displayed,
“Already set in other SYS” is displayed in the second line below and it cannot be set again even
though it is selected.
 EPC Setup
Press F5 (SYS#), and “SYS No.:” is displayed in the second line below.
Use the numeric keypad to select the number and press the Set/Ent key, and the SYS contents
of the number is shown.
Press F6 (Oven#), and “Oven No.:” is displayed in the second line below.
Use the numeric keypad to select the number and press the Set/Ent key, and it is refl ected in the
second line above and the valve set of the specifi ed oven is completed.
Point a cursor to EPC and press the Set/Ent key, and options are displayed in the second line
below.
Point a cursor to an item and press the Set/Ent key, and options are displayed in the second line
below. Select either Yes or NA and press the Set/Ent key, and the setting is done.
When Yes is selected for either EPC: CarrierN-1 or CarrierN-2 that is set in the Program on the
EPC setup screen, EPC program set in the SYS method set is available.
(When Yess are selected for EPC: CarrierN-1, CarrierN-2, and Utility N-1 to N-4 that are set to
Constant in the EPC setup screen Yes, enter set values in the Operating Parameters.)
Not installed EPCs are displayed as ----.
When any of the Not installed EPC is used by other SYS, **** is displayed.
In some SYSs, when an EPC is set to Yes and other SYS is selected, **** is displayed, “Already
set in other SYS” is displayed in the second line below and it cannot be set again even though it
is selected.
• Up to 2 carrier gases set in the program can be set for one SYS.
 Oven Setup
Press F5 (SYS#) and “SYS No.:” is displayed in the second line below.
Use the numeric keypad to select the number and press the Set/Ent key, and the SYS contents
of the number is shown.
2nd Edition : May 11, 2012-00