Instruction Manual

<5. EtherLCD>
5-55
IM 11B08A01-01E
Display Item Name Set Lower Limit Upper Limit Unit Remarks
Copy source
GCM #
GCM number 1 6
SYS # SYS number 1 6
Method # Method number 1 6
Copy target
GCM number
 16
Copy target
method
number
 16
 EPC Program Set Screen
This screen is displayed when EPC has been set.
Press F4 (EPC).
11/11/22
15:15:45
EPC program Set (1/2)
11/11/22
15:15:45
EPC program Set (2/2)
GCM #1 / SYS #1 / Method #1 / Gas #1-#1 GCM #1 / SYS #1 / Method #1 / Gas #1-#1
> - Initial Press setpoint ZZZ ZN NAAA > - #1 Press ramp rate ZZN NAAA/min
- #1 Press ramp start time ZZZ ZN Ns - #1 Press hold setpoint ZZZ ZN NAAA
Total run-time ZZZ ZN Ns - #1 Press hold time ZZZ ZN Ns
- #2 Press ramp rate ZZN NAAA/min
- #2 Press hold setpoint ZZZ ZN NAAA
- #2 Press hold time ZZZ ZN Ns
- #3 Press ramp rate ZZN NAAA/min
- #3 Press hold setpoint ZZZ ZN NAAA
- #3 Press hold time ZZZ ZN Ns
Main Oven# Gas# Main Oven# Gas#
F1 F2 F3 F4 F5 F6 F1 F2 F3 F4 F5 F6
Figure 5.69
Example of the EPC program set screen
F1(Main): Navigates to SYS Method Setup screen (Main).
F5(Oven#): Specifi es an oven number.
F6(Gas#): Specifi es a carrier gas number
• Only the gas belonging to the relevant SYS can be set with F6 (Gas#).
2nd Edition : May 11, 2012-00
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