Owner's manual

<7 ROUTINE MAINTENANCE> 7-7
IM 11Y01B02-01E-A 4th Edition September 11, 2012-00
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• Carefully extract the process window – handle with care!
• Using7/64”Allenkeycarefullyinsertthroughtheaccessholesandremovethefourwindow
retainingscrewsandlockwashers–uselongneedlenoseplierstocarefullyholdeachscrewas
it comes lose.
• TAKE CARE not to touch the detector or laser collimation lens!