Operation Manual
    <6. PARAMETERS>
6-20
IM 01F06A00-01EN
Indication 
Diagnostic 
Message 
Error Name  Problem Cause 
Current Output  % Output 
Pulse 
Output 
Engineering 
Unit Output 
Totalizing 
Output 
Engineering 
Temp Output 
Pulse / Status Output 
How to recover
Select fl ow 
rate 
Select 
temperature
Select fl ow 
rate 
Select 
temperature
Pulse
(*2) 
Status
(*2) 
Alarm
(*2)
Err-01 FLOW 
OVER 
OUTPUT 
Over range 
output 
signal 
Output signal is 
110% or more
(*1)
Fixed at 
110%
(*1)
Normal 
Operation 
Fixed at 
110%
(*1)
Normal 
Operation 
Normal 
Operation
Normal 
Operation
Normal 
Operation 
Normal 
Operation 
Normal 
Operation
Normal 
Operation
OFF(H) Change 
parameters or 
over ranged fl ow 
input 
Err-02 SPAN SET 
ERROR 
Span Setting 
Error 
Span setting 
parameter is more 
than 1.5 times of 
max fl ow velocity 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
OFF(H) 
Change 
parameters span 
factor is outside the 
acceptable limits 
Err-06 PULSE OUT 
ERROR 
Pulse output 
error 
Pulse output 
frequency is more 
than 10kHz 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Fixed at 
10KHz 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Fixed at 
10kHz 
Change 
parameters 
(ItemC,ItemE)
Err-07 PULSE SET 
ERROR 
Pulse setting 
error 
Pulse output 
frequency setting is 
more than 10kHz 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Change 
parameters 
(ItemC,ItemE)
CHECK 
Vibration 
Transient 
noise 
Error of 
Vibration 
Transitional 
disturbance 
Hold Normal 
Operation 
Hold Normal 
Operation 
Normal 
Operation 
Hold Normal 
Operation 
Normal 
Operation 
Hold Hold  OFF(H) CHECK the 
vibration 
CHECK 
Vibration 
High 
vibration 
Error of 
Vibration 
High vibration  Based on 
K45 
Normal 
Operation 
Based on 
K45 
Normal 
Operation 
Stop Output  Based on 
K45 
Stop the total  Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
OFF(H) CHECK the 
vibration 
CHECK 
Flow 
Fluctualing  Error of Flow Fluctuating  Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
OFF(H) CHECK the 
clogging 
CHECK 
Flow 
Clogging  Error of Flow  Clogging  Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
OFF(H) CHECK the 
clogging 
Err-10
(*3)
 TEMP 
OVER 
OUTPUT 
Over range 
Temp output 
signal 
Temp output signal 
is 110% or more, 
and 0% below. 
Normal 
Operation 
Fixed at 110% 
in case of over 
110%, and fi xed 
at 0% when 
in case of less 
than 0%.
(*1)
Normal 
Operation 
Fixed at 110% 
in case of over 
110%, and fi xed 
at 0% when in 
case of less than 
0%.
(*1) 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
OFF(H) CHECK the 
temperature 
or temperature 
span 
Err-11
(*3)
 OVER 
TEMP 
Error of 
temperature 
Temp value is -50°C 
below or 300°C 
over. 
Remain in 
operationat 
Temp=-50°C or 
Temp=300°C 
Remain in 
operation at 
Temp=-50°C or 
Temp=300°C 
Remain in 
operationat 
Temp=-50°C or 
Temp=300°C 
Remain in 
operation at 
Temp=-50°C or 
Temp=300°C 
Remain in 
operation at 
Temp=-50°C or 
Temp=300°C 
Remain in 
operation at 
Temp=-50°C or 
Temp=300°C 
Remain in 
operation at 
Temp=-50°C or 
Temp=300°C 
Remain in 
operation at 
Temp=-50°C or 
Temp=300°C 
Remain in 
operation at 
Temp=-50°C or 
Temp=300°C 
Remain in 
operation at 
Temp=-50°C or 
Temp=300°C 
OFF(H) CHECK the 
temperature 
Err-12
(*3)
 TEMP 
SENSOR 
FAULT 
Error of 
thermometer 
Disconnection 
or short of 
thermometer sensor 
Remain in 
operation 
at Manual 
setting 
condition 
Based on F58  Remain in 
operation 
at Manual 
setting 
condition 
Based on F58  Remain in 
operation 
at Manual 
setting 
condition 
Remain in 
operation 
at Manual 
setting 
condition 
Remain in 
operation 
at Manual 
setting 
condition 
Based on 
F58 
Remain in 
operation 
at Manual 
setting 
condition 
Remain in 
operation 
at Manual 
setting 
condition 
OFF(H) Change 
thermometer 
sensor. 
Err-13
(*3)
 TEMP 
CONV. 
FAULT 
Error of 
temperature 
converter 
Temperature 
converter is failed 
Remain in 
operation 
at Manual 
setting 
condition 
Based on F58  Remain in 
operation 
at Manual 
setting 
condition 
Based on F58  Remain in 
operation 
at Manual 
setting 
condition 
Remain in 
operation 
at Manual 
setting 
condition 
Remain in 
operation 
at Manual 
setting 
condition 
Based on 
F58 
Remain in 
operation 
at Manual 
setting 
condition 
Remain in 
operation 
at Manual 
setting 
condition 
OFF(H) Change 
converter 
case build in 
temperature 
sensor. 
Err-20 PRE-AMP 
ERROR 
PRE-AMP is 
failed 
Normal 
Operation 
Remain in 
operation at 
Manual Setting 
Temperature 
Value 
Normal 
Operation 
Remain in 
operation at 
Manual Setting 
Temperature 
Value 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Remain in 
operation at 
Manual Setting 
Temperature 
Value 
Normal 
Operation 
Normal 
Operation 
OFF(H) Replace the 
AMP. unit 
Err-30 EE PROM 
ERROR
EEPROM 
is not 
functioning 
correctly
Over 110% 
or -2.5% 
below
Over 110% or 
-2.5% below 
Fixed at 0%  Fixed at 0%  Halt  Fixed at 0%  Halt  Fixed at 0%  Stop the 
Output 
OFF(H) OFF(H) Replace the 
AMP. unit 
Err-40 FLOW 
SEBSOR 
FAULT 
Error of Flow 
sensor 
Flow sensor Is fauit.  Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
Normal 
Operation 
OFF(H) Change Flow 
sensor 
CPU FAULT  CPU is 
failed 
All operations are 
Dead. Display and 
self dignostic function 
is also dead.g 
Over 110% 
or -2.5% 
below 
Over 110% or 
-2.5% below 
Halt  Halt  Halt Halt Halt  Halt Halt Halt  Halt Replace the 
AMP. unit 
Note. Normal Operation : Operation continues without relation to error occurrence.
 Remain in Operation : Calculation continues with relation to error occurrence.
(*1): “110%” is based on “D30 : OUT LIMIT(H)”.
(*2): Pulse output  : These conditions should be done in case of which B20 is “SCALED PULSE”, “UNSCALED PULSE”, “FREQUENCY”.
Status output : These conditions should be done in case of which B20 is “FLOW SW (LOW :ON)”, “FLOW SW (LOW : OFF)”.
Alarm output : These conditions should be done in case of which B20 is “Alarm”.
(*3): Only for /MV
6.5  Self-Diagnostic (Error Code List)
When an ERROR is displayed by SELF CHECK in item A60, B60, C60, D60, E60, H60, J60, K60 or M60, 
press function key F2 [DIAG] and the error contents are displayed.










