Operation Manual
<13. GENERAL SPECIFICATIONS>
13-25
IM 01F06A00-01EN
n High Process Temperature Version (/HT): DY025/HT to DY100/HT
n Cryogenic Version (/LT): DY015/LT to DY100/LT
n Wafer type
H1
103.5 (4.07)
B
H
125 (4.92)
L
øD
øC
2 -øG
4.5
(0.18)
59 (2.32)59 (2.32)
ø94 (3.70)
F
E
87.5 (3.44)
ELECTRICAL
CONNECTION
EARTH
TERMINAL
TYPE REMOTE
MODEL CODE
DY015/LT DY025/LT, DY025/HT DY040/LT, DY040/HT
PROCESS
CONNECTION
AJ1 AJ2 AJ4 AA1 AA2 AA4
AD1
to
AD4
AJ1 AJ2 AJ4 AA1 AA2 AA4
AD1
to
AD4
AJ1 AJ2 AJ4 AA1 AA2 AA4
AD1
to
AD4
L 70 (2.76) 70 (2.76) 70 (2.76)
B 35 (1.38) 35 (1.38) 35 (1.38)
C 14.6 (0.57) 25.7 (1.01) 39.7 (1.56)
D 35.1 (1.38) 50.8 (2.00) 73 (2.87)
H 391 (15.39) 401 (15.79) 419 (16.50)
H1 270 (10.63) 272 (10.71) 279 (10.98)
E
49.5
(1.95)
49.5
(1.95)
56.6
(2.23)
42.7
(1.68)
47.1
(1.85)
47.1
(1.85)
46
(1.81)
63.6
(2.50)
63.6
(2.50)
67.2
(2.65)
56
(2.20)
62.9
(2.48)
62.9
(2.48)
60.1
(2.37)
74.2
(2.92)
74.2
(2.92)
84.9
(3.34)
69.7
(2.74)
80.8
(3.18)
80.8
(3.18)
77.8
(3.06)
F
24.7
(0.97)
24.7
(0.97)
28.3
(1.11)
21.4
(0.84)
23.5
(0.93)
23.5
(0.93)
23
(0.91)
31.8
(1.25)
31.8
(1.25)
33.6
(1.32)
28
(1.10)
31.4
(1.24)
31.4
(1.24)
30.1
(1.19)
37.1
(1.46)
37.1
(1.46)
42.4
(1.67)
34.8
(1.37)
40.4
(1.59)
40.4
(1.59)
38.9
(1.53)
G
13
(0.51)
13
(0.51)
17
(0.67)
14
(0.55)
14
(0.55)
14
(0.55)
13
(0.51)
17
(0.67)
17
(0.67)
17
(0.67)
14
(0.55)
17
(0.67)
17
(0.67)
13
(0.51)
17
(0.67)
17
(0.67)
21
(0.83)
14
(0.55)
20
(0.79)
20
(0.79)
17
(0.67)
WEIGHT kg (lb)
3.2 (7.06) 4.1 (9.04) 4.7 (10.36)
TYPE REMOTE
MODEL CODE
DY050/LT, DY050/HT DY080/LT, DY080/HT DY100/LT, DY100/HT
PROCESS
CONNECTION
AJ1 AJ2 AJ4 AA1 AA2 AA4
AD1
to
AD4
AJ1 AJ2 AJ4 AA1 AA2 AA4
AD1
AD2
AD3
AD4 AJ1 AJ2 AJ4
AP1
AA1
AP2
AA2
AP4
AA4
AD1
AD2
AD3
AD4
L 75 (2.95) 100 (3.94) 120 (4.72)
B 37.5 (1.48) 40 (1.57) 50 (1.97)
C 51.1 (2.01) 71 (2.80) 93.8 (3.69)
D 92 (3.62) 127 (5.00) 157.2 (6.19)
H 450.5 (17.74) 485 (19.09) 515 (20.28)
H1 301 (11.85) 318 (12.52) 333 (13.11)
E
(Note 1)
45.9
(1.81)
49.8
(1.96)
(Note 1)
48.6
(1.91)
48.6
(1.91)
(Note 1)
57.4
(2.26)
61.2
(2.41)
65.1
(2.56)
(Note 1)
64.4
(2.54)
64.4
(2.54)
61.2
(2.41)
61.2
(2.41)
67
(2.64)
70.8
(2.79)
78.5
(3.09)
72.9
(2.87)
76.6
(3.02)
82.6
(3.25)
68.9
(2.71)
72.7
(2.86)
F
(Note 1)
55.4
(2.18)
60.1
(2.37)
(Note 1)
58.7
(2.31)
58.7
(2.31)
(Note 1)
69.3
(2.73)
73.9
(2.91)
78.5
(3.09)
(Note 1)
77.7
(3.06)
77.7
(3.06)
73.9
(2.91)
73.9
(2.91)
80.8
(3.18)
85.5
(3.37)
94.7
(3.73)
88
(3.46)
92.5
(3.64)
99.7
(3.93)
83.1
(3.27)
87.8
(3.46)
G
(Note 1)
17
(0.67)
17
(0.67)
(Note 1)
17
(0.67)
17
(0.67)
(Note 1)
17
(0.67)
21
(0.83)
21
(0.83)
(Note 1)
20
(0.79)
20
(0.79)
17
(0.67)
17
(0.67)
17
(0.67)
21
(0.83)
23
(0.91)
17
(0.67)
20
(0.79)
23
(0.91)
17
(0.67)
21
(0.83)
WEIGHT kg (lb)
6.4 (14.11) 9.8 (21.61) 13.2 (29.11)
(Note 1) The holes are not provided.
(Note 2) The ow direction is opposite (right to left when facing onto indicator) in case of code/CRC.
Unit : mm
(approx. inch)