Datasheet

Revision: April 2007 We reserve the right to modify this specification without prior notice
5678
1 2 3 4
Vdd
Vout
GND
Min.
47nF
1
2
3
4 GND
5
6 ST
7 OUT
8 VDD
Power
Input
Output
Power
VSS
Self test control
Analog output
VDD
1)
Repeatability:
maximum offset
occurring with position change after
return to initial position (corresponds
to achievable precision, including
temperature hysteresis after
temperature compensation and
linearization).
2) Cross axis sensitivity: maximum
error occurring with (additional)
inclination or acceleration from
another direction than the
measuring plane
3)
Must be 5V DC stabilized; variations
affect the measurement
4) Measuring range: Trigonometric
function:
angle = arcsin






−
ySensitivit
(Offset) 2,5Vout
(paste values without units)
5) Typical values;
6) Long term stability: calculated
values from HTB tests. Test results
available at request.
Inclination (and Acceleration) Sensors
SCA61T series
The sensors are based one an advanced “bulk micro machined” MEMS technology.
The three dimensional structure (3D MEMS) of these sensors comprise a pendulum
made of mono crystalline silicon. The pendulum is hermetically enclosed between two
silicon discs. From this construction results a long term stable, high resolution und
shock resistant sensor. A gas damping prevents overshooting and interfering
resonance oscillation. The movement of the pendulum is measured capacitive by an
ASIC.
• senses in positive and negative direction
• high repeatability up to 0,01% over range
• high resolution: up to 0,001% over range
• shock resistance of the pendulum min. 50’000g
• temperature range -40 .. +125°C
• active and passive temperature compensation
• 16x11x5 mm DIL12-pin in housing for SMD mounting
• wide wanted signal: 0.5… 4.5V output over measuring range
Other versions
• mono and bi-axial acceleration sensor chips in DIL-housing for SMD mounting
• single and dual axis sensors in IP67 housing with fixing holes, cable
within or without connector and standardized signal output (4... 20mA, 2… 10V, digital output)
Parameter Conditions
SCA61T
FHH1G
SCA61T
FA1H1G
Unit
Measuring range
4)
+/- 0,5
+/- 30
+/- 1
max +/- 90
g
°
Repeatability at 0°
(horizontal position)
1)
at 20°C,
typically
0,25
0,014
0,25
0,014
mg
°
Resolution at 0° / 1g DC .. 1Hz 0,015
0,001
0,015
0,001
mg
°
typ. Offset temperature
dependency
20...60°C -0/+0,066
-0/+0,006
-0/+0,066
-0/+0,006
mg / °C
° / °C
long term stability
6)
10 years
6)
0,62
0,036
0,62
0,036
mg
°
Measuring direction x-axis x-axis
Cross axis sensitivity
2)
4 4 %
damping -3 dB 18 18 Hz
5)
Operating temperature range -40 .. +125 -40 .. +125 °C
Shock resistance 20’000 20’000 g
Output signal V
out
Offset = V
out
in 0°/1gposition
Sensitivity
0,5 .. 4,5
2,5
4
0,5 .. 4,5
2,5
2
V
V
V/g
Power supply
3)
5 5 VDC