User Manual

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SCA_TI_E Seite 3 von 6
2 Characteristics / Technology
2.1 Shock resistance of the sensing element
The sensing elements based on capacitive measuring principle feature high precision and high shock
resistance, resulting from the particular 3D micromechanics technology made of high purity silicon.
Thanks to the optimized structure, no drifts caused by deformation must be expected, even after
severe shocks.
2.2 Repeatability and long term stability
With SCA61T for instance repeatability up to 0,01° or 0,2mg and long term stabilities of the same
order can be achieved. The hysteresis (e.g. 0,02°) caused by quick temperature changes degenerates
to zero within a short time.
2.3 Resolution
The sensing elements formed by a dual capacitor produce extremely low noise levels and a high
output signal. The major part of the noise is caused by the signal conditioning circuitry. Resolutions in
the order of 0,001° or 15µg/√Hz are possible.
2.4 Reduced sensitivity to vibrations thanks to gas attenuation
Influences by vibrations may interfere with inclination measuring. The gas attenuation in the sensing
element filters a good part of such interferences and in addition helps avoid overshooting of the
sensing pendulum. For inclination sensors the influence of vibrations is reduced, for vibration sensors
the sensor’s natural resonance is damped. This means that the appropriate sensor type must be
selected for each application.
2.5 Structure of the sensing element
Silicon wafer
with metal film
(capacitor)
Pendulum with
measuring mass
Silicon wafer
with metal
film
(capacitor)
Measuring
direction
2,9mm
1.95m