Datasheet

Revision: April 2007 We reserve the right to modify this specification without prior notice
78910
3 4 5 6
V DD
Vout X
GND
Min.
100nF
ST-Y CSB
SCK MISO MOSI
1 SCK
2
3 MISO
4 MOSI
5 OUT Y
6 GND
7 CSB
8
9 ST-Y
10 ST-X
11 OUT X
12 V DD
1112
21
ST-X
Vout Y
1)
Repeatability:
maximum offset
occurring with position change after
return to initial position (corresponds
to achievable precision, including
temperature hysteresis after
temperature compensation and
linearization).
2) Cross axis sensitivity: maximum
error occurring with (additional)
inclination or acceleration from
another direction than the
measuring plane
3) Supply must be 5V DC stabilized;
variations affect the measurement
4) Measuring range: Trigonometric
function:
angle = arcsin






−
ySensitivit
(Offset) 2,5Vout
(paste values without units)
5) Typical values;
6) Long term stability: calculated
values from HTB tests. Test results
available at request.
Dual Axis Inclination Sensors
SCA100T series
The sensors are based one an advanced “bulk micro machined” MEMS
technology. The three dimensional structure (3D MEMS) of these sensors
comprise a pendulum made of mono crystalline silicon. The pendulum is
hermetically enclosed between two silicon discs. From this construction results a
long term stable, high resolution und shock resistant sensor. A gas damping
prevents overshooting and interfering resonance oscillation. The movement of
the pendulum is measured capacitive by an ASIC.
• senses in positive and negative direction
• high repeatability up to 0,01% over range
• high resolution: up to 0,001% over range
• shock resistance of the pendulum min. 50’000g
• temperature range -40 .. +125°C
• active and passive temperature compensation
• 16x11x5 mm DIL12-pin in housing for SMD mounting
• wide wanted signal: 0.5… 4.5V output over measuring range
Other versions
• mono and bi-axial acceleration sensor chips in DIL-housing for SMD
mounting
• mono and bi-axial sensors in IP67 housing with fixing holes, cable or
connector and standardized signal output (4... 20mA, 2… 10V, Digital output)
Parameter Conditions
SCA100T
D01
SCA100T
D02
Unit
Measuring range
4)
+/- 0,5
+/- 30
+/- 1
+/- 90
G
°
Repeatability at 0°
(horizontal position)
1)
at 20°C,
typically
0,25
0,014
0,25
0,014
mg
°
Resolution at 0° / 1g DC .. 1Hz 0,015
0,001
0,015
0,001
mg
°
typ. Offset temperature
dependency
20...60°C
-0/+0,066
-0/+0,006
-0/+0,066
-0/+0,006
mg / °C
° / °C
long term stability
6)
10 years
6)
0,62
0,036
0,62
0,036
mg
°
Measuring direction horizontal x-axis x-axis
Cross axis sensitivity
2)
4 4 %
Damping -3 dB 18 18 Hz
5)
Operating temperature range -40 .. +125 -40 .. +125 °C
Shock resistance Chip 20’000 20’000 g
Output signal V
out
Offset = V
out
in 0° / rest pos.
Sensitivity
0,5 .. 4,5
2,5
4
0,5 .. 4,5
2,5
2
V
V
V/g
Power supply
3)
5 5 VDC