Instruction manual

VHS-4, VHS-6 and VHS-250 Diffusion Pumps

Figures

1-1 VHS-4 Speed and Throughput Curves ................................................................................... 22

1-2 VHS-4 Wiring Information .................................................................................................... 22

1-3 VHS-6 Speed and Throughput Curves ................................................................................... 24

1-4 VHS-6 Wiring Information .................................................................................................... 24

1-5 VHS-250 Speed and Throughput Curves ............................................................................... 26

1-6 VHS-250 Wiring Information ................................................................................................ 26

3-1 VHS4 and VHS-6 Cold Cap Removal/Installation.................................................................. 37

3-2 VHS-250 Cold Cap Removal/Installation............................................................................... 38

3-3 VHS-4 Diffusion Pump Jet Assembly ..................................................................................... 40

3-4 VHS-6 and 250 Diffusion Pump Jet Assembly ....................................................................... 41

3-5 VHS-6 and VHS-250 Heater Mounting ................................................................................. 42

3-6 VHS-4 Heater Mounting ....................................................................................................... 43