Instruction manual

VHS-4, VHS-6 and VHS-250 Diffusion Pumps

D R A F T 6 / 1 8 / 1 3

Table 5-4 VHS-6 Replacement Parts

Part Number Description

86488301 Standard Cold Cap Assembly

F6455301 Extended Cold Cap Assembly

F3365301 Jet Assembly

F3373301 Splash Baffle

L9172301 Foreline Baffle Assembly

642906025 Thermoswitch

699006025 Standoff, ceramic insulating, Cold Cap

647306125 120 V / 2200 watt Heater Element

647306175 208 V / 2200 watt Heater Element

647306225 240 V / 2200 watt Heater Element

656179100 Wire, No. 10 stranded, nickel

648056680 Lugs, Replacement, nickel

86087001 Heater Insulator

86086301 Heater Clamping Plate

86088301 Heater Cover Plate

L8998001 Heater Insulating Blanket

L8997001 Heater Cover

K0377184 O-Ring Kit includes:

❑

3 Butyl inlet flange O-ring, Parker No. 2-267

❑

3-Butyl-N foreline flange O-ring, Parker No. 2-332

❑

10 Viton fill and drain O-rings (old style), Parker No. 2-112

❑

10 Viton fill and drain O-rings (new style, Parker No. 2-113

❑

1 PTFE gasket

❑

1 Sight glass O-ring, Parker No. 2-226

K6948301 NEOVAC SY Diffusion Pump Fluid (1000 cc)

695474005 DC-704 Diffusion pump Fluid (500 cc)

695475005 DC-70S Diffusion Pump Fluid (500 cc)

695405005 Santovac 5 Diffusion Pump Fluid (500 cc)

86715001 Spring, Cold Cap

Commercial Screw, Rd hd machine, no. 6-32x3/16, stainless steel