Instruction manual

VHS-4, VHS-6 and VHS-250 Diffusion Pumps
5
Contents
Introduction and Installation.......................................................................................................... 19
Introduction ................................................................................................................................ 19
Pump Specifications .............................................................................................................. 19
Installation .................................................................................................................................. 28
Unpacking ............................................................................................................................ 28
Pump Oil Installation ............................................................................................................ 28
Vacuum System Connections ................................................................................................ 29
Cooling Water Connections .................................................................................................. 29
Electrical Connections ........................................................................................................... 30
Thermal Switch ..................................................................................................................... 31
Operation......................................................................................................................................... 33
Startup 33
Shutdown ................................................................................................................................... 34
Maintenance and Service............................................................................................................... 35
General Maintenance 35
Inspection Requirements ............................................................................................................. 35
Cleaning ..................................................................................................................................... 36
VHS-4 and VHS-6 Cold Cap Removal/Installation ....................................................................... 37
VHS-250 Cold Cap Removal/Installation ..................................................................................... 38
Jet Assembly Removal/Installation ............................................................................................... 39
Heater Replacement ................................................................................................................... 42
Pump Fluid Charge ..................................................................................................................... 44
Troubleshooting.............................................................................................................................. 45
Leakage 45
Outgassing .................................................................................................................................. 45
Poor Pump or System Performance ............................................................................................. 46
Replacement Parts.......................................................................................................................... 49