Instruction manual

VHS-4, VHS-6 and VHS-250 Diffusion Pumps
D R A F T 6 / 1 8 / 1 3
25
Table 1-3 lists the VHS-6 dimensions.
Table 1-3 VHS-6 Dimensions
ASA ISO Conflat
in mm in mm in mm
Height 21.92 557 21.92 557 21.92 557
Centerline to Centerline 13.38 340 13.38 340 13.38 340
Flange Face to Flange Face 8.62 219 8.62 219 8.62 219
EIectrlc8I Box Height 9.12 232 9.12 232 9.12 232
Sight Glass,
Degrees from Foreline
90° clockwise 90° clockwise 90° clockwise
Electrical Box,
Degrees from Foreline
30° counterclockwise 30° counterclockwise 30° counterclockwise
Inlet Flange, Nominal Size 6” ASA ISO -200K 10” CFF
Inlet Flange, OD 11.00 279 9.45 240 9.97 253
Inlet Flange, ID 7.88 200 7.72 196 7.88 200
Inlet Flange, Thickness 0.75 19 0.47 12 0.96 24
Inlet Flange, Bolt Circle 9.50 241 N/A N/A 9.12 232
Inlet Flange, Number of Holes 8 N/A 24
Inlet Range, Hole Size 0.81 21 N/A N/A .33 8
O-ring Groove ID 8.20 208 N/A N/A N/A N/A
O-ring Groove Width 0.18 4 N/A N/A N/A N/A
Foreline Flange, Nominal Size 1½" ASA KF-50 3
3/8
" CFF
OD 5.00 127 2.05 75 3.38 86
ID 1.95 50 1.95 50 1.95 50
Thickness 0.63 16 0.24 6 0.62 16
Bolt Circle 3.88 99 N/A N/A 2.85 72
Number of Holes 4 N/A N/A 8
Hole Size 0.62 16 N/A N/A 0.33 8
O-ring Groove ID 2.22 56 N/A N/A N/A N/A
O-ring Groove Width 0.30 8 N/A N/A N/A N/A