Instruction manual

VHS-4, VHS-6 and VHS-250 Diffusion Pumps
22
D R A F T 6 / 1 8 / 1 3
Figure 1-1 shows the VHS-4 speed and throughput curves.
Figure 1-1 VHS-4 Speed and Throughput Curves
NOTE Speed curves were generated according to AVS Standard 4.1.
Figure 1-2 gives the VHS-4 wiring information.
Figure 1-2 VHS-4 Wiring Information
Speed with standard cold cap
Speed with extended cold cap
Air Speed (//sec)
INLET PRESSURE — TORR
Throughput (Torr-//sec)
1800
1200
900
600
300
5
4
3
2
1
10
−10
10
−9
10
−4
10
−7
10
−10
10
−5
10
−4
10
−3
10
−2
10
−1
0 0
*Note: Speed curves were generated according to AVS Standards 4.1