Instruction manual

High Throughput Diffusion Pumps

DRAFT 12/23/04

Replacement Parts

Table 16 HS-16 Replacement Parts

Part Number Description

79299301 Cold cap assembly, includes No.10-32 SST Rd Hd screw and No. 10-32 SST hex nut)

L8839301 Cold cap gasket set

L8840301 Cold cap nut and follower set

83612401 Jet assembly

80798301 Foreline baffle assembly

77261001 Fill and drain plug

L8841301 Thermoswitch kit

647316025 Heater element with leads (2700 W, 200 V)

647316027 Heater element with leads (3200 W, 200 V)

647316037 Heater element with leads (2700 W, 400 V)

647316038 Heater element with leads (3200 W, 400 V)

647316039 Heater element with leads (2700 W, 430 V)

647316040 Heater element with leads (3200 W, 430 V)

647316041 Heater element with leads (2700 W, 440 V)

647316042 Heater element with leads (3200 W, 440 V)

647316020 Heater element with leads (2700 W, 240 or 415 V)

647316030 Heater element with leads (2700 W, 480 V)

647316023 Heater element with leads (3200 W, 240 or 415 V)

647316033 Heater element with leads (3200 W, 480 V)

K4919001 Heater crush plate, required with heater replacement

K4917001 Heater clamping plate

79309001 Heater insulating blanket

79308001 Heater cover plate

K0377164 O-ring kit; includes:

❑ 1 Butyl ASA inlet O-ring (48214001)

❑ 1 Buna-N ASA foreline O-ring (660890348)

❑ 8 Viton fill and drain O-rings (660892213)

❑ 1 Sight glass O-ring (660892232)

❑ 1 Graphite sight glass gasket (K8478001)

695472008 DC-702 diffusion pump fluid, one-gallon

695474008 DC-704 diffusion pump fluid, one-gallon

695475008 DC-705 diffusion pump fluid, one-gallon

Commercial Item Cold cap fitting, Imperial flex fitting #66-FL, 1/2" OD tube x 3/8" FPT

K8475001 Sight glass

L6367301 Jet coupling

656118114 Nickel wire No. 14 AWG

648056329 Nickel lug for No. 14 AWG