Instruction manual

High Throughput Diffusion Pumps
40
DRAFT 12/23/04
HS-20 Jet Assembly
Figure 26 HS-20 Jet Assembly
To disassemble the jet assembly:
1. Remove the cold cap or halo baffle as described in
“Cold Cap” on page 38.
2. Unscrew the jet cap from the coupling assembly.
3. Remove the orifice plug.
4. Withdraw the central tube complete with the second
stage jet and jet shield.
5. Remove the lower jet assembly from the pump,
which consists of the third stage jet, the jet shield, the
fourth stage jet, and the jet base.
6. Remove the third stage shield from the lower jet
assembly.
7. Remove the securing screws between the third and
fourth stage jets. Carefully preserve the screws. Be
sure that the jet spacers are not damaged in handling.
8. Remove the fourth stage jet from the jet base.
9. Clean all parts thoroughly.
NOTE Before removing the securing screws
in the following step, scribe a reference
mark at the interface to assure that
original holes are mated when
reassembled.