Instruction manual

High Throughput Diffusion Pumps

DRAFT 12/23/04

Electrical Connections

Terminal connections for each pump are different depending on the source voltage available, the principle difference

being a Y or ∆ connection of the heaters. Table 13 provides the figure number and page of the wiring diagrams in this

manual. The specific wiring diagrams for each pump shows both Y and

∆ connections and the source voltages for each

connection.

To wire the pump:

1. Check the heater for correct supply voltage and find

the appropriate wiring diagram. The correct voltage is

shown.

2. Check load balance by measuring the resistance of

each branch. The heater resistances are given on

their respective wiring diagrams.

3. Make the connections to the terminals in the

electrical main junction box at the foreline shown in

the appropriate outline drawing. Use flexible conduit

to make it easier to remove the pump for service.

4. Wire the thermal switches to a control mechanism to

ensure that power to the pump is shut off if one of the

switches opens. The thermal switch wires can be

found in the electrical box.

5. Complete the wiring of the pump and double-check

that the proper terminal arrangement has been used

for the source voltage at the site.

WARNING Improper operation, severe heater

damage, and danger to personnel

can result from an improperly wired

diffusion pump system.

WARNING High voltages (up to 480 V) can kill.

Always break the primary circuit to the

pump before starting work on the heater

or its wiring.

Table 13 Wiring Diagram Locations

Source Voltage HS-16 Wiring HS-20 Wiring HS-32 Wiring NHS-35 Wiring

200 Figure 13 on page 21 Figure 15 on page 23

240 Figure 11 on page 19 Figure 13 on page 21 Figure 16 on page 24 Figure 20 on page 28

280 Figure 11 on page 19

400 Figure 13 on page 21 Figure 20 on page 28

415 Figure 12 on page 20 Figure 14 on page 22 Figure 18 on page 26 Figure 21 on page 29

430 Figure 13 on page 21

440 Figure 20 on page 28

460 Figure 17 on page 25

480 Figure 13 on page 21 Figure 19 on page 27 Figure 22 on page 30

CAUTION Do not operate the pump at more than

5% over its rated voltage.