Instruction manual
15
High Throughput Diffusion Pumps
DRAFT 12/23/04
System and Utility Connections
Vacuum Connections
The pump body must be installed vertical and plumb.
Check that the mating flange on the system is horizontal
±1
o
. If this condition is not met, correct the system mount
before installing the pump.
To make the vacuum system connection:
1. Wipe the O-ring seals with a clean cloth lightly
moistened with diffusion pump fluid. Do not use
solvents.
2. Install the O-ring in its groove. Be careful not to
damage the sealing surface with cuts, nicks, or
scratches.
3. Raise the pump using a lifting apparatus with
sufficient capacity. Pump weights are given in Table 4
on page 6.
4. Align the bolt holes of the flanges and assemble the
bolts.
5. Tighten the bolts evenly and compress the O-ring seal
until light contact is achieved between the metal
flanges.
6. Make a tightness check of the fill and drain plugs and
the sight glass assembly. Refer to the appropriate
outline drawings, Figure 6 on page 9 through
Figure 9 on page 12. Apply light to medium torque,
just enough to visually compress the gaskets.
Cooling Water
To connect cooling water:
1. Connect the cold cap cooling coil and all body and
foreline cooling in series except the Quick Cool coil
(see the following paragraph) as shown in Figure 10.
Refer to Table 4 on page 6 for the cooling water
flowrate for your pump type. Higher flows will not
harm the pump.
2. Connect the cooling water discharge to an open
drain. This permits the water temperature flow to be
easily checked. The temperature of discharged
cooling water should not exceed 130 °F.
Parallel connections should be employed when the water
pressure is low or if the discharge temperature routinely
exceeds 130
o
F.
Figure 10 Cooling Water Connections
WARNING Utility failure can cause overheating, damage to the equipment and explosion. Design your system to
protect personnel and property from these hazards.
NOTE Over time, minute leaks may develop
through the gaskets. These leaks may
only be detectable with extremely
sensitive mass spectrometer leak
detectors.