Instruction manual

High Throughput Diffusion Pumps

DRAFT 12/23/04

Unpacking

Vacuum Technologies large diffusion pumps are shipped

in sturdy containers that permit prolonged storage in suit-

ably protected areas without special precautions, how-

ever, care must be taken when moving the crated pump

with a fork lift to avoid excessive shock.

Carefully remove the outer shipping container. Visually

inspect the pump for damage that may have occurred

during shipping and notify the carrier immediately if dam-

age is suspected. If damage is noticed, save the crate and

the internal packing for inspection.

Setup

Assembly

1. Remove flange covers, blank plugs and protective

plugs from water connections. Do not to scratch or

otherwise damage the sealing surface (the O-ring

groove on top of the inlet flange).

2. Check the internal jet assembly. It should be

concentric and firmly seated on the bottom of the

pump. Use a flashlight to verify that the ejector

nozzle is opposite the foreline (the pump outlet

connection). The jet assembly should not rotate;

it is held by an indexing pin at the bottom of the

assembly.

3. If the expected vacuum level is below 10

−

Torr,

clean the pump using the procedure outlined in the

next section. Otherwise make sure that there are no

foreign materials inside the pump, and proceed with

attaching the pump to the system as instructed in

“System and Utility Connections” on page 15.

WARNINGS ❑ Before lifting a pump, check the

weight of the equipment in Table 4

on page 6.

❑ Use power-assisted equipment,

and trained moving and installation

personnel to avoid dropping,

slipping, and overturning the

pump and severely injuring

personnel.

❑ Do not stand under equipment

being moved.