Instruction manual

11
High Throughput Diffusion Pumps
DRAFT 12/23/04
Figure 8 HS-32 Outline with ASA Flanges
Table 9 HS-32: Dimensions and Weights
Units HS-32
Height, minimum
including clearance
for heater access
in (mm) 74 (1879.6)
Weight lbs (kg) 1500 (680.4)
Connections:
Body and Foreline
Quick Cool coils
in
in
3/8 FPT
3/8 FPT
Table 10 HS-32 Flange Dimensions
ASA ISO
Units Inlet Foreline Inlet, 800 F Forline, 200 K
OD in (mm) 38.12 (968.3) 11.00 (279.4) 36.22 (920.0) 9.45 (240.0)
ID in (mm) 32.06 (814.3) 6.73 (170.9) 32.06 (814.3) 6.73 (170.9)
Thickness in (mm) 1.12 (28.5) 0.75 (19.1) 1.12 (28.5) 0.47 (11.9)
Bolt Circle in (mm) 36.25 (920.8) 9.50 (241.3) 35.04 (890.0)
No. of Holes 16 8 24
Size of Holes in (mm) 0.87 (22.1) 0.88 (22.4) 0.55 (14.0)
Orientation Holes straddle center line of foreline
Gasket Groove ID
Width
Depth
in (mm)
in (mm)
in (mm)
32.5 (825.5)
0.56 (14.2)
0.25 (6.4)
7.44 (189.0)
0.38 (9.7)
0.18 (4.6)
32.75 (831.9)
0.56 (14.2)
0.25 (6.35)
Requires NW-200
Centering Ring (not
included with pump)