Instruction manual
High Throughput Diffusion Pumps
10
DRAFT 12/23/04
Figure 7 HS-20 Outline with ASA Flanges
Table 7 HS-20: Dimensions and Weights
Units HS-20
Height, minimum
including clearance
for heater access
in (mm) 56 (1422)
Weight lbs (kg) 600 (272.2)
Connections:
Body and Foreline
Quick Cool coils
in
in
1/4 FPT
3/8 FPT
Table 8 HS-20 Flange Dimensions
ASA ISO
Units Inlet Foreline Inlet, 630 K Foreline, 160 K
OD in (mm) 27.50 (698.5) 9.00 (228.6) 27.17 (690.1) 7.09 (180.1)
ID in (mm) 21.25 (539.8) 5.06 (128.5) 21.25 (539.8) 5.06 (128.5)
Thickness in (mm) 1.12 (28.5) 0.75 (19.1) 0.78 (19.8) 0.47 (11.9)
Bolt Circle in (mm) 25.00 (635.0) 7.50 (190.5)
No. of Holes 20 8
Size of Holes in (mm) 1.25 (31.8) 0.75 (19.1)
Orientation Holes straddle center line of foreline
Gasket Groove ID
Width
Depth
in (mm)
in (mm)
in (mm)
21.63 (549.4)
0.48 (12.2)
0.25 (6.6)
5.31 (134.9)
0.38 (9.7)
0.09 (2.3)
Requires NW-630
Centering Ring (not
included with pump)
Requires NW-160
Centering Ring (not
included with pump)










