Instruction manual

9
High Throughput Diffusion Pumps
DRAFT 12/23/04
Physical Specifications
Figure 6 HS-16 Outline with ASA Flanges
Table 5: HS-16: Dimensions and Weights
Units HS-16
Height, minimum
including clearance
for heater access
in (mm) 51 (1295.4)
Weight lbs (kg) 500 (227)
Connections:
Body and Foreline
Quick Cool coils
in
in
1/4 FPT
1/4 FPT
φ23.50 O.D.
16xφ1.12 holes
Electrical
φ7.50
4xφ.75 holes
45°
1/4 F.P.T.
Water Connections (Typ.)
3/2 F.P.T.
Cold Cap Connections
NW-25 Gauge Port
1/4 F.P.T.
Water Connections (Typ.)
Sight Glass
with Fill and Drain
1/4 F.P.T.
Quick Cool Coils (optional)
Electrical
24.00
(610)
43.00
(1092)
Foreline Cooling Coil
24.00
(610)
Table 6 HS-16 Flange Dimensions
ASA ISO
Units Inlet Foreline Inlet, 500 K Foreline, 100 K
OD in (mm) 23.50 (596.9) 7.50 (190.5) 21.65 (549.9) 5.12 (130.1)
ID in (mm) 18.00 (457.2) 3.58 (90.9) 18.00 (457.2) 3.58 (90.9)
Thickness in (mm) 1.00 (25.4) 0.50 (12.7) 0.67 (17.0) 0.47 (11.9)
Bolt Circle in (mm) 21.25 (539.8) 6.00 (152.4)
No. of Holes 16 4
Size of Holes in (mm) 1.13 (28.7) 0.75 (19.1)
Orientation Holes straddle center line of foreline
Gasket Groove ID
Width
Depth
in (mm)
in (mm)
in (mm)
18.69 (474.7)
0.37 (9.4)
0.18 (4.6)
4.31 (109.5)
0.30 (7.6)
0.14 (3.6)
Requires NW-500
Centering Ring (not
included with pump)
Requires NW-100
Centering Ring (not
included with pump)