Instruction manual

7
High Throughput Diffusion Pumps
DRAFT 12/23/04
Warmup Time minutes 30 45 60 60 Cooldown Time
Without Quick Cool With Quick Cool
minutes
48 30
85 45
180
60
180
60
Fluid Charge qt (US) liters 3
2.8
5
4.7
12
11.4
12
11.4
Recommended backing pump capacity*
cfm 80 100 300 300
*Recommended sizes when operating at maximum throughput.
Weight lbs (kg) 500 (227) 600 (272) 1500 (682) 1500 (682)
Table 4 Operating Specifications (Continued)
Specification Units HS-16, 8.1 kW HS-16, 9.6 kW HS-20 HS-32 NHS-35