Instruction manual
High Throughput Diffusion Pumps
6
DRAFT 12/23/04
Table 4 Operating Specifications
Specification Units HS-16, 8.1 kW HS-16, 9.6 kW HS-20 HS-32 NHS-35
Operating Range Torr
mbar
7x10
−
4
to <5x10
−
8
9.1x10
−
4
to <7x10
−
8
1x10
−
3
to <5x10
−
8
1.3x10
−
3
to <7x10
−
8
8x10
−
4
to <5x10
−
8
1x10
−
3
to <6.7x10
−
8
8x10
−
4
to <5x10
−
8
1.0x10
−
3
to <7x10
−
8
5x10
−
4
to <5x10
−
8
6.5x10
−
4
to <7x10
−
8
Pumping Speed,
Maximum
l/s, Air
l/s, Helium
10,000
12,500
17,500
22,000
32,000
40,000
50,000
62,500
Throughput (Air), Max.
Optimum Range
Overload Range
(@ 1x10
−
2
Torr )
Torr-l/ s
mbar-l/s
Torr-l/ s
mbar-l/s
8.5
11.3
12.5
16.6
10.0
13.3
13.5
18.0
14
19
18
23
23
31
35
45
25
33
35
45
CAUTION
Extended operation of pumps in the Overload condition may result in breakdown of the top jet and
resultant fluid loss through the foreline.
Forepressure, Max.
No Load
Full Load
Torr
mbar
Torr
mbar
0.65
0.86
0.55
0.73
0.65
0.86
0.55
0.73
0.50
0.66
0.35
0.46
0.55
0.73
0.40
0.53
Backstreaming Rate
at Pump Inlet
(within Optimum
Operating Range)
mg/cm
2
/min <0.0015 <0.0015 <0.0007 <0.0005
Electrical Power
AC, 50/60 Hz, 3 phase
kW 8.1 9.6 12 24 24
Cooling Water
Flowrate @ Inlet
Temperature of
60 to 80
o
F
gpm (US) 1.5 1.5 4.0 4.0