Instruction manual

Cantilever Preparation
Silicon Cantilever Substrates
Rev. B MultiMode SPM Instruction Manual 61
Figure 4.1d Silicon Probe Tip Step Profile Artifact (side-to-side)
Measurements of line pitch are often best measured using the side-to-side faces of the tip, which
exhibits symmetry. Because of the approximate 17° half angle of the tip, the line or space
measurement is best done at the top of the line for simplification of the measurement artifacts (see
Figure 4.1d).
Scan line produced using theoretical
probe tip shape on a 1 - 2 µm deep
vertical wall trench
Scan direction = 90 deg.
Scan Line Profile
1 - 2 µm Deep Trench
73° 73°
Note: Any wall angle that is > 73 deg.
will be shown as 73 deg. in the image.