Instruction manual

Calibration, Maintenance, Troubleshooting and Warranty
Vertical Engagement Scanners—Installation, Use, and Maintenance
Rev. B MultiMode SPM Instruction Manual 331
The scanner le may be copied with any name, as long as it includes a .SCN extension. Make
certain the vertical scanner’s le name is not the same as a preexisting le; otherwise, it will
overwrite the preexisting le.
4. Once the scanner file is copied, reboot the NanoScope software to resume.
Note: The vertical scanner les are identical to all other “J” and “E” scanner les
except for the Motor sensitivity parameter. On vertical scanners this parameter
value is larger than older models. A summary of Motor Sensitivity parameter
values is provided below.
15.16.2 Select scanner
Select Realtime > Microscope > Scanner and choose the appropriate scanner. After highlighting
the newly copied scanner le, then click on the panel’s Ok button to exit.
15.16.3 Inspect scanner
Load a calibration reference (e.g., P/N 498-000-025) on the MultiMode SPM, engage the tip on the
surface and obtain an image. Verify that the scanner is working properly, and take a series of
measurements on the calibration reference to ensure accuracy.
If the calibration reference is not measuring accurately, it may be necessary to calibrate software
parameters to ensure measuring accuracy. This calibration procedure is detailed in earlier sections
of this chapter. Follow the instructions to properly recalibrate your vertical scanner.
Motor Sensitivity parameter value
(Tip travel per half step)
AFM, LFM,
TipView STM
MultiMode AFM
Vertical Scanners 80 110
3-screw Scanners 19 26