Instruction manual

Calibration, Maintenance, Troubleshooting and Warranty
Vertical Engagement Scanners—Installation, Use, and Maintenance
Rev. B MultiMode SPM Instruction Manual 329
15.16 Vertical Engagement Scanners—Installation, Use,
and Maintenance
Figure 15.16a MultiMode Scanner
Veeco now offers “E” and “J” scanners which permit vertical engagement without significant lateral
movement. The vertical scanners feature the following:
• Completely motorized tip-sample engage.
• Fully vertical engage head does not tilt.
• Easy to locate tip on desired scan area.
• 0.5µm lateral repeatability on subsequent engages.
• Accommodates samples up to 8.0mm thick.
• Integrated fluid seal at top of scanner resists fluid spillage.
• Retaining springs mount permanently to scanner body.
Your vertical scanner should come shipped with the following:
• XXXXJV.SCN (“J” scanners) or XXXXEV.SCN (“E” scanners) parameter file on CD.
• Stabilizing screw, P/N 130-000-145
In addition, you will require a calibration reference, such as a P/N 498-000-025.