Instruction manual

Calibration, Maintenance, Troubleshooting and Warranty
Quick Guide to Piezo Tube Calibration
312 MultiMode SPM Instruction Manual Rev. B
Figure 15.10a Calibration Recommended Parameters
019
020
To the side of some scan parameters are the recommended scan size
and scan angle setting for obtaining accurate calibration values.
440V, 90°
440V, 0°
150V, 90°
150V, 0°
440V, 0°
440V, 0°
150V, 0°
440V, 0°
440V, 90°
150V, 0°
150V, 90°
+100V Z Cente
r
Position
0V Z Center
Position
-100V Z Center
Position
440V, 0°
440V, 0°
150V, 0°