Instruction manual

Calibration, Maintenance, Troubleshooting and Warranty
Quick Guide to Piezo Tube Calibration
310 MultiMode SPM Instruction Manual Rev. B
7. Reduce the scan size to 150V and adjust the Fast and Slow mag1 values to make the image
linear. Typical values are 0.6 - 1.5.
15.10.2 Run Autocalibration Software (Factory Operation)
Note: You can use Fine Tune in place of Autocalibration.
1. Select Calibrate > Capture Calibration. Allow the software to run through the entire
sequence of capturing 12 images. Adjust the up/down or left/right directions on the first four
images to make the scanner scan over the pits (striped images will appear).
2. Withdraw the microscope and select Offline > Utility > Autocalibration and run program.
15.10.3 Fine Tune the X-Y Scanner
Note: You can use Capture Calibrate and Autocalibrate in place of Fine Tune.
Sensitivity
1. Engage the microscope and scan at 440V, 0º Scan angle.
2. Adjust the X Fast sens until the fast axis is correct. (True distance/measured distance)* sens.
= correct sens.
3. Adjust the Y Slow sens until the slow axis is correct.
4. Change Scan angle to 90º.
5. Adjust the Y Fast sens until the fast axis is correct.
6. Adjust the X Slow sens until the slow axis is correct.
Deratings
1. Change the Scan angle to 0º and reduce the Scan size to 150V.
2. Adjust the X Fast derate until the fast axis is correct. (Increase the derating if the distance is
too large. Decrease the derating if the distance measures too small). Adjust in 0.01
increments for a 120µm scanner, 0.001 for a 12µm scanner.
3. Adjust the Y Slow derate until the slow axis is correct.
4. Change the Scan angle to 90º.
5. Adjust the Y Fast sens until the fast axis is correct.