Instruction manual

Calibration, Maintenance, Troubleshooting and Warranty
Calibrating Z
Rev. B MultiMode SPM Instruction Manual 303
7. Click QUIT to exit the Depth dialog box.
Figure 15.8f Z Calibration Depth Dialog Box
15.8.4 Correct Z Sensitivity
If the depth of the pit on the 10-micron silicon calibration reference deviates significantly from 200
nm, correct the Z sensitivity parameter in the Z Calibration dialog box.
1. Transfer to the Z Calibration dialog box by selecting Realtime > Microscope > Calibrate
> Z.
2. Divide the actual depth of features (200nm for the 10µm calibration reference) by the
measured depth (indicated in Depth analysis by the Peak to Peak value):
3. Multiply this quotient by the Z sensitivity value in the Z Calibration dialog box, and replace
the former Z sensitivity value with the new result.
4. Click on OK to enter the new Z sensitivity value.
Note: The numerator value above (200 nm) is for Veeco 10µm silicon reference. For
other calibration references, set the numerator equal to the depth of features
specified by the manufacturer. Ideally, calibration references should have
features with heights comparable to those being imaged and measured on
samples.
15.8.5 Recheck Z-axis Measuring Accuracy
After executing the steps above, recheck the Z-axis measuring accuracy of the SPM by repeating
the steps outlined above until you obtain accuracy of 1 to 2%.
200nm
Peakto Peak value
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