Instruction manual

Calibration, Maintenance, Troubleshooting and Warranty

Calibrating Z

302 MultiMode SPM Instruction Manual Rev. B

2. Go to the display screen and draw a cursor box surrounding the entire image (see Figure

15.8d).

Figure 15.8d Draw a Cursor Box

3. Click EXECUTE in the display monitor’s top menu bar.

Note: Height data within the drawn cursor box displays on the monitor, showing two,

prominent peaks. These peaks correspond to two elevations on the surface: the

bottom of the pit and the top surface. There should be a line cursor on each

peak.

4. If the two peaks do not appear in the display, increase the Histogram filter cut off in the

Conﬁgure dialog box to 2-10nm.

5. Open the Configure dialog box by clicking the CONFIGURE button in the Depth dialog box

(see Figure 15.8e).

Figure 15.8e Z Calibration Conﬁgure Dialog Box

6. In the Data result dialog box located under the image on the display screen, check the Peak

to Peak value and record it for future reference.