Instruction manual
Calibration, Maintenance, Troubleshooting and Warranty
Fine-tuning for X-Y Calibration
298 MultiMode SPM Instruction Manual Rev. B
Calculation Method
1. Select Realtime > Microscope > Calibrate > Scanner to display the Scanner Calibration
dialog box.
2. Record the X fast derate or Y slow derate value.
3. Perform the following calculation where s is the X fast Sens or Y slow Sens value; a is the
actual distance; d is the X fast derate or Y slow derate value you recorded earlier; m is the
measured distance; and, v is the Scan size in volts:
4. Return to the Scanner Calibration dialog box.
5. Select the X fast derate or Y slow derate parameter.
6. Enter the new X fast derate or Y slow derate value calculated in Step 3. This adjusts the
scanner’s fast axis to more closely match calculated distances with actual feature distances.
7. To set the new parameter value, click OK.
15.7.5 Measure Vertically at 150V Scan Size
1. Select two widely-spaced features on the sample image of known separation, then use the
mouse to draw a vertical line between them. (For example, on a 10µm, silicon reference,
draw the line from the top edge of one pit to the top edge of another pit as far away as
possible.) The microscope will display the measured distance next to the line.
2. Check to see whether the microscope’s measured distance agrees with the known vertical
distance. If there is significant disagreement between the two, fine tuning will be required;
go to Step 3. If the displayed distance agrees with the known distance, no further calibration
is required.
3. Adjust your Y slow derate value by one of two methods: see “Trial and Error Method” on
page 297. or “Calculation Method” on page 298.
15.7.6 Change Scan angle and Repeat Calibration Routines
As a final step, change the Scan angle on the Scan Controls panel to 90 degrees, then repeat steps
Section 15.7.2—Section 15.7.5 above for the following parameters: Y fast sens, X slow sens, Y
fast der, and X slow der. This will ensure the scanner is calibrated along the X- and Y-axis for
scanning at 90º.
s
a
m
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sd440 v–()–[]⋅
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440 v–
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