Instruction manual

Calibration, Maintenance, Troubleshooting and Warranty
Fine-tuning for X-Y Calibration
Rev. B MultiMode SPM Instruction Manual 297
Divide the known distance by the distance displayed next to the line drawn in Step 2. Write this
value down.
4. Select the Realtime > Microscope > Calibrate > Scanner function to display the Scanner
Calibration dialog box.
5. Multiply the quotient obtained in Step 3 by the Y slow sens value shown on the Scanner
Calibration panel, then enter the new value. This should adjust the scanner’s slow scan axis
to more closely match calculated distances with actual feature distances. To save the new
parameter value, click on the Ok button.
15.7.4 Measure Horizontally at 150V Scan Size
1. Verify that the Scan angle is set to 0.00 degrees, and that Units (Other Controls panel) is
set to Volts. Set the Scan size parameter on the Scan Controls panel to one-third the
maximum (150V). Select two widely-spaced features on the sample image of known
separation, then use the mouse to draw a horizontal line between them. (For example, on a
10-micron, silicon reference, draw the line from the left side of one pit to the left side of
another pit as far away as possible.) The microscope will display the measured distance next
to the line.
2. Check to see whether the microscope’s measured distance agrees with the known horizontal
distance. If there is significant disagreement between the two, fine tuning is required; go to
Step 3. If the displayed distance agrees with the known distance, skip to Section 15.7.5.
3. Adjustments may be made in one of two ways. The first method uses trial and error to “dial
in” in the correct value. The second method calculates a precise correction.
Trial and Error Method
1. Select Realtime > Microscope > Calibrate > Scanner to display the Scanner Calibration
dialog box.
2. Select the X fast derate parameter or Y slow derate for Y-axis adjustment.
3. If the measured distance is less than the actual distance, decrease the X fast derate parameter
slightly or Y slow derate for Y-axis adjustment and re-measure image features.
4. Adjust deratings up or down until measurements accord with known feature distances.