Instruction manual

Calibration, Maintenance, Troubleshooting and Warranty
Linearity Correction Procedure
Rev. B MultiMode SPM Instruction Manual 287
5. If the features of the end third are too large for the box, decrease the parameter. If the features
are too small, increase the parameter.
Note: Compare only parts of the current scan, not the previous scan.
Figure 15.4c Slow Scan Linearization: Arg
Adjusting Slow Arg
1. Follow the same instructions for Fast arg.
2. Adjust the zoom box to fit the beginning and ending of the scan, then check the center.
3. If the features in the center are too large, reduce the Slow arg value. If the features in the
center are too small, increase the Slow arg value.
4. After adjusting Slow arg values, check if Slow mag0 requires readjusting.
5. Repeat the procedure for adjusting Slow mag0 until the rulings are evenly spaced along the
slow axis.
15.4.2 Adjusting Fast Mag1
Initial Adjustment
1. For initial adjustment, click OK to close the Scanner Calibration window.
Note: Selecting Cancel resets parameters to default values when the box is opened.
2. Change the Scan size to 150V.
3. Select View > Scope Mode.
Slow Arg Too LargeSlow Arg Too Small