Instruction manual

Calibration, Maintenance, Troubleshooting and Warranty
Check Sample Orthogonality
Rev. B MultiMode SPM Instruction Manual 283
15.3 Check Sample Orthogonality
Check the sample scan for orthogonality along both the X- and Y-axes. If the scan is aligned along
one axis of the scan but not another, it may be necessary to adjust the microscope’s Orthogonality
parameter in the Scanner Calibration panel.
15.3.1 Measure Orthogonality
1. To measure a captured image’s orthogonality, view it using the Offline > View > Top View
function.
2. On the display monitor, select the Angle command and use the mouse to draw a cursor
between the edges (or centers) of widely spaced pits (see Figure 15.3a).
Figure 15.3a Non-Orthogonal and Corrected, Orthogonal Image
Note: In Figure 15.3a, pits align with the vertical (slow) axis but skew with the
horizontal (fast) axis. The angle should be measured with the vertex near the
center of the image and the vertices in the upper-right or lower-left quadrant.
The angle displays on the white status bar at the bottom of the display monitor.
3. Use the mouse to drag the cursor until it is oriented correctly then read the angle off the status
bar. If the angle differs by more than a half degree, a correction is required; otherwise, move
on to the next step.
15.3.2 Adjust Sample Orthogonality
1. Click Realtime > Microscope > Calibrate > Scanner to access the Scanner Calibration
panel. The Orthogonality parameter is displayed on the bottom-right corner of the panel.
2. Enter the difference between 90º and the angle measured in the Top View image.
Note: For example, if the angle measured in the Top View image was 92.5º, enter a
value of -2.5º in the Orthogonality parameter.