Instruction manual

Calibration, Maintenance, Troubleshooting and Warranty
272 MultiMode SPM Instruction Manual Rev. B
• X-Y Calibration using Capture Calibration and Autocalibration: Section 15.5
• Capture Calibration: Section 15.5.1
• Autocalibration: Section 15.6
• Fine-tuning for X-Y Calibration: Section 15.7
• Prepare System for Fine-Tuning: Section 15.7.1
• Measure Horizontally at 440V Scan Size: Section 15.7.2
• Measure Vertically at 440V Scan Size: Section 15.7.3
• Measure Horizontally at 150V Scan Size: Section 15.7.4
• Measure Vertically at 150V Scan Size: Section 15.7.5
• Change Scan angle and Repeat Calibration Routines: Section 15.7.6
• Calibrating Z: Section 15.8
• Engage: Section 15.8.1
• Capture and Correct an Image: Section 15.8.2
• Measure Vertical Features: Section 15.8.3
• Correct Z Sensitivity: Section 15.8.4
• Recheck Z-axis Measuring Accuracy: Section 15.8.5
• Calculate Retracted and Extended Offset Deratings: Section 15.8.6
• Finding a Pit with an “A” Scanner: Section 15.8.7
• Calibration of “A” Scanners for Atomic-scale Measurement: Section 15.9
• Prepare Sample: Section 15.9.1
• Quick Guide to Piezo Tube Calibration: Section 15.10
• Linearize Scanner: Section 15.10.1
• Run Autocalibration Software (Factory Operation): Section 15.10.2
• Fine Tune the X-Y Scanner: Section 15.10.3
• Calibrate the Z Piezo: Section 15.10.4