Instruction manual

Rev. B MultiMode SPM Instruction Manual 271

Chapter 15 Calibration, Maintenance,

Troubleshooting and Warranty

This chapter provides detailed instructions for the ﬁne calibration of Veeco MultiMode SPMs.

Additionally, the latter part of the chapter focuses on problems commonly encountered during

operation of the microscope and then concludes with maintenance procedures for the MultiMode

SPM adjustment screws.

Speciﬁcally, this chapter includes:

• SPM Calibration Overview: Section 15.1

• Theory Behind Calibration: Section 15.1.1

• Calibration References: Section 15.1.2

• Calibration Setup: Section 15.2

• Check Scanner Parameter Values: Section 15.2.1

• Align Calibration Reference: Section 15.2.2

• Set Realtime Parameters: Section 15.2.3

• Set Up SPM for Contact AFM: Section 15.2.4

• Check Sample Orthogonality: Section 15.3

• Measure Orthogonality: Section 15.3.1

• Adjust Sample Orthogonality: Section 15.3.2

• Linearity Correction Procedure: Section 15.4

• Adjust Mag0 and Arg: Section 15.4.1

• Adjusting Fast Mag1: Section 15.4.2

• Adjust Slow Mag1: Section 15.4.3