Instruction manual

List of Figures
18 MultiMode SPM Instruction Manual Rev. B
Figure 14.3k Jumper configuration for applying external voltage to sample
(for systems with the Basic Extender Module).. . . . . . 255
Figure 14.4a Toggle Switches on Back of Basic Extender Module . . . . . . 256
Figure 14.4b Phase detection Cantilever Tune
(for systems with the Basic Extender Module installed)257
Figure 14.4c Shift in Phase at Fixed Drive Frequency . . . . . . . . . . . . . . . . 258
Figure 14.4d Shift in amplitude at fixed Drive Frequency
(Basic Extender Module not installed). . . . . . . . . . . . . 259
Figure 14.4e Amplitude Detection Cantilever Tune
(Basic Extender Module not Installed).. . . . . . . . . . . . 260
Figure 14.5a Simplified Block Diagram of Basic Extender Module in Surface
Potential Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262
Figure 14.6a Normal jumper configuration as shipped from factory
(for systems with the Basic Extender Module). Sample is held
at ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 263
Figure 14.6b Applying Voltage to Sample Diagram . . . . . . . . . . . . . . . . . . 264
Figure 14.6c Jumper configuration for application of voltage to sample via sample
chuck.. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264
Figure 14.7a Toggle Switches on Back of Basic Extender Module . . . . . . 265
Chapter 15 Calibration, Maintenance, Troubleshooting and Warranty . . . . . 271
Figure 15.1a Scanner Crystal Voltage and Photodiode Voltage . . . . . . . . . 277
Figure 15.1b Effect of Nonlinearity and Hysteresis . . . . . . . . . . . . . . . . . . 278
Figure 15.1c Veeco Silicon Calibration Reference . . . . . . . . . . . . . . . . . . . 280
Figure 15.3a Non-Orthogonal and Corrected, Orthogonal Image . . . . . . . 283
Figure 15.4a Fast Scan Linearization: Mag0 . . . . . . . . . . . . . . . . . . . . . . . 285
Figure 15.4b Fast Scan Linearization: Arg . . . . . . . . . . . . . . . . . . . . . . . . . 286
Figure 15.4c Slow Scan Linearization: Arg . . . . . . . . . . . . . . . . . . . . . . . . 287
Figure 15.5a Capture Calibration Dialog Box . . . . . . . . . . . . . . . . . . . . . . 289
Figure 15.5b Capture Control Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . 290
Figure 15.5c Calibration Images. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 291
Figure 15.7a Calibration Horizontal Reference . . . . . . . . . . . . . . . . . . . . . 295
Figure 15.7b Scanner Calibration Dialog Box . . . . . . . . . . . . . . . . . . . . . . 296
Figure 15.8a Z Calibration Image. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 300
Figure 15.8b Draw a Stopband . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 301
Figure 15.8c Depth Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 301
Figure 15.8d Draw a Cursor Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 302
Figure 15.8e Z Calibration Configure Dialog Box . . . . . . . . . . . . . . . . . . . 302
Figure 15.8f Z Calibration Depth Dialog Box . . . . . . . . . . . . . . . . . . . . . . 303
Figure 15.8g Scope Trace screen will display a step when the tip encounters a pit in
the reference sample. . . . . . . . . . . . . . . . . . . . . . . . . . . 305
Figure 15.9a Typical atomic scan of graphite. Note the highly regular lattice of the
atoms. The cursor line describes a distance of 6.66Å.. 307
Figure 15.10a Calibration Recommended Parameters . . . . . . . . . . . . . . . . 312
Figure 15.12a Images With/Without Streaks . . . . . . . . . . . . . . . . . . . . . . . 320