Instruction manual

List of Figures
14 MultiMode SPM Instruction Manual Rev. B
Chapter 4 Cantilever Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Figure 4.1a Silicon Cantilever Substrates in Wafer. . . . . . . . . . . . . . . . . . . . 58
Figure 4.1b Silicon Cantilever—Theoretical Tip Shape. . . . . . . . . . . . . . . . 59
Figure 4.1c Silicon Probe Tip Profile Artifact (front to back). . . . . . . . . . . . 60
Figure 4.1d Silicon Probe Tip Step Profile Artifact (side-to-side) . . . . . . . . 61
Figure 4.1e Silicon Probe—Common Shape Artifact. . . . . . . . . . . . . . . . . . 62
Figure 4.1f Common Silicon Probe Profile—Resultant Scan Artifact . . . . . 63
Figure 4.2a Silicon Nitride Cantilevers in a Wafer . . . . . . . . . . . . . . . . . . . . 64
Figure 4.2b Substrate Break-Off. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
Figure 4.2c Substrate Shown with the 100 and 200µm Long Cantilevers . . 65
Figure 4.2d Silicon Nitride Cantilevers—Specifications and Tip Shape . . . 66
Figure 4.2e Silicon Nitride Cantilevers—Sidewall Profile Effect. . . . . . . . . 67
Chapter 5 Head, Probe and Sample Preparation . . . . . . . . . . . . . . . . . . . . . . . 69
Figure 5.1a Gently Press the Sample onto the Sticky Tab Until Secured . . . 72
Figure 5.1b MultiMode Base with Scanner Mounted on Support Ring . . . . 73
Figure 5.1c Head is Held Securely Using Retaining Springs . . . . . . . . . . . . 74
Figure 5.1d Tip Up / Down Switch on the MultiMode SPM’s Base. . . . . . . 74
Figure 5.1e Silicon Nitride Probe Tip Installation . . . . . . . . . . . . . . . . . . . . 75
Figure 5.1f Underside Detail of Fluid Cell . . . . . . . . . . . . . . . . . . . . . . . . . . 76
Figure 5.1g Install Tipholder in Head without Touching the Sample . . . . . . 77
Figure 5.2a Laser Alignment with Piece of Paper. . . . . . . . . . . . . . . . . . . . . 79
Figure 5.2b Etched Silicon Tip Laser Alignment . . . . . . . . . . . . . . . . . . . . . 80
Figure 5.2c Silicon Nitride Laser Alignment . . . . . . . . . . . . . . . . . . . . . . . . 81
Figure 5.2d Signals Produced by the Photodetector are Optimized using the Head’s
Various Adjustments . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Figure 5.3a NanoScope Software Window . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Figure 5.3b Microscope Select Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . 84
Chapter 6 Contact AFM Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Figure 6.1a Photodetector Mirror Adjustments—Rear View . . . . . . . . . . . . 88
Figure 6.1b Laser Adjustment Knobs—Top View . . . . . . . . . . . . . . . . . . . . 89
Figure 6.2a Select Show All Items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Figure 6.2b Enable Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Figure 6.2c Scan Controls Panel Settings for Initial Setup (Contact Mode) 92
Figure 6.2d Interleave Controls Panel Settings for Initial Setup (Contact Mode)93
Figure 6.2e Channel 1 Panel for Initial Setup (Contact Mode). . . . . . . . . . . 93
Figure 6.2f Feedback Controls Panel Settings for Initial Setup (Contact Mode)94
Figure 6.2g Other Controls Panel Settings for Initial Setup (Contact Mode).94