Instruction manual

Contact AFM Mode
Suggested Initial Control Settings
Rev. B MultiMode SPM Instruction Manual 93
Interleave Controls Panel
If it is not already present, open the Interleave Controls Panel by selecting Panels > Interleave.
Verify that the Interleave mode eld is set to Disabled. (Do not attempt to set Interleave mode to
Enabled at this point).
Figure 6.2d Interleave Controls Panel Settings for Initial Setup (Contact Mode)
Channel 1, 2 and 3 Panel
On the Channel 1 panel, set Data type to Height (see Figure 6.2e). Set Data Scale to a reasonable
value for the sample. (For example, for the 180nm step height calibration sample a reasonable Data
Scale setting would be 300nm initially). Line direction can be set to either Trace or Retrace.
Figure 6.2e Channel 1 Panel for Initial Setup (Contact Mode)
On the Channel 2 panel, set Data type to Off to disable the secondary channel (select Panels >
Channels > Channel 2 to view the Channel 2 Panel).
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