Owner's manual

Trek Model 1100TN
Electrostatic Force
Microscope (EFM)
Electrostatic Voltage Distribution
Measurement System
Typical Applications Include
! Measurement of antistatic bags, Si wafer
! Electrophotography material testing
Photovoltaic materials evaluation
MEMS testing
!
!
TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK
716-438-7555 • 716-201-1804 (fax) • www.trekinc.com • [e-mail]
Features and Benefits
!
!
!
Can be used in atmosphere conditions
Spatial resolution is better than 10 µm
Three measurement modes:
- Static
- Line Profile
- 3D Mapping
Key Specifications
!
!
!
!
!
!
Voltage Range: ±1 kV
Voltage Sensitivity:
Accuracy: Better than 0.5% of full scale
Better than 100 mV
Incremental Step: 1 µm, minimum (detector)
Detector Tip: 5 µm X 5 µm
Measurement Area: 5 mm X 5 mm
The T
rek Model
1
100TN Electrostatic Force
Microscope (EFM) enables voltage
distribution
measurements with a very
high
spatial
resolution –
better
than 10
µm
– which
is
well beyond
the capability
of typical
electrostatic voltmeters. T
rek's
EFM
can
also
measure voltage distribution
across
a
much
larger
surface area as compared to a
scanning
probe
microscope
when operated under
atmospheric conditions.
T
rek's
EFM
employs a
feedback
voltage
to the
detector which
is
equal to the
measured
voltage thus
preventing
arcing between the detector
and
the surface
under
test.
Measurement Sample of the Antistatic Bag (500 µm X 500 µm)