2
Revision History
Revision No. History Released Date Editor by
1.0 First version (WD 15nm) 2019/12/26 TSD
1.1
Vibration Format Updated
Add 2.6 Recommended Measurement Point
Revise 5.2.5 PS(Power shield) description
2020/05/25 TSD
1.2 Modified Mechanical Specification 2020/10/06 TSD
