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PD1D Piezo Inertia Drive Stage Chapter 6: Specifications
Rev A, August 3, 2021 Page 15
Chapter 6 Specifications
Item #
PD1D(/M)
Travel Range(X & Y Axes)
20 mm (0.78")
Typical Step Size
1
1 μm
Maximum Step Size
2
<3 μm
Step Size Adjustability
2
Up to 30%
Maximum Step Frequency
3
2 kHz
Speed (Typical Max,
Continuous Stepping)
4
3 mm/s
Average Speed Variation
Over Travel Range
4
±10%
Horizontal Load Capacity
3 kg (6.61 lbs)
Vertical Load Capacity
5
100 g (3.5 oz)
Clamping / Holding Force
3 N
Pitch / Yaw Over Travel Range
200 μrad
XY Stacked Orthogonality
≤2 mrad
Lifetime
6
>10 Billion Steps
Connector Type
SMC Female
Cable Length
1 m (3.3 ft) Cable Included
Piezo Capacitance
170 nF
Max Operating Voltage
125 V
Operating Temperature
10 to 40 °C
Dimensions
32.5 mm x 32.5 mm x 20.0 mm
(1.28" x 1.28" x 0.79")
Weight (Including Cable)
137 g (4.83 oz)
Note: all specifications are measured using the KIM101 controller and with the stage mounted on a surface with
flatness ≤5 μm.
*It’s not recommended to mount this monolithic stage vertically because one axis will get a lateral force to the rails
and may influence its angular error and even reduce the lifespan of the rail. If it must be mounted vertically, long
term running (>3 billion steps) may cause the creep of the rails in the vertical axis, leading to the decrease of travel
range and an impact on the application. Recovery through horizontal mounting and several full range travel
sequences is recommended after many steps (>1 billion steps) of vertical traveling.
1
This can vary by 20% due to component variance, change of direction, and application conditions.
2
This is adjusted by changing the piezo drive voltage and frequency - see the KIM101 controller manual for more details.
3
2 kHz is the maximum output from the KIM101 and KIM001 controllers.
4
Specified at 2 kHz Step Frequency
5
This is equivalent to the push/pull force along the axial/travel direction, which is 1 N.
6
Driven by the KIM101 Controller Under 2000 Hz/85 V