User Manual

Doc. No. SF
-OMZ0013-B
Revision history
Rev. A : September, 2021
Add Carbon dioxide gas(gas)
Delete Lubrication oil
Rev. B : October, 2022
Caution on Installation Clerical error correction
4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN
Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362
URL http://www.smcworld.com
Note:
Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.
© 2022 SMC Corporation All Rights Reserved
2022-10-1811:22
DP 097499