User Manual
Doc. No. SF
∗-OMZ0013-B 
Revision history 
Rev. A : September, 2021 
Add Carbon dioxide gas(gas) 
Delete Lubrication oil 
Rev. B : October, 2022 
                Caution on Installation Clerical error correction 
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  Note: 
Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 
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2022-10-1811:22
DP 097499










