Datasheet

Series PFMB
Series
12 0.2 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000
Applicable flow range [L/min]
0.5 25
1
50
2
100
2
200
5
500
10 1000
1
10
550
10 100
20 200
50 500
150 3000
300 6000
600
12000
0.2
10
−0.5 0.5
Series
Minimum
setting unit
Minimum
setting unit
Detection
method
Applicable
fluid
Detection
method
Applicable
fluid
Thermal
type
(MEMS)
Thermal
type
(MEMS)
Air
N
2
Air
N2
Argon
CO2
Air
N2
0.1 L/min
0.5 L/min
1 L/min
2 L/min
5 L/min
5 L/min
10 L/min
Thermal
type
(MEMS)
Bypass
flow type
Thermal
type
(Thermistor)
Air
N2
0.1 L/min
0.01 L/min
1 L/min
123−3 −2 −1 −0.5 0 0.5
Applicable flow range [L/min]
PFMV
PFM
PF2A
PFMB
−1
−3
1
3
1
1
5
2
1
5
2
0.2
.
2
1
1
5
2
5
3
6
120
00
0
3
3
1
5
0
01
0
1
03
0
3
0 0.5
0
0
Flow Switch Flow Rate Variations
NewNew
Features 3