Datasheet

Error display function
When an error or abnormality arises, the location and contents are displayed.
DescriptionDisplay Contents Action
Load current of 80 mA or more is applied
to the switch output (OUT1).
Load current of 80 mA or more is applied
to the switch output (OUT2).
There is a reverse flow equivalent to
–5% or more.
The flow rate exceeds the accumulated
flow rate range.
Eliminate the cause of the overcurrent by
turning off the power supply and then turn
on it again.
Decrease the flow rate.
Turn the flow to correct direction.
Clear the accumulated flow rate.
Turn the power off and on again.
OUT1 over current error
OUT2 over current error
Instantaneous flow
error
Reverse flow error
Accumulated flow
error
PFMB7201
PFMB7501
PFMB7102
System error
“999” will flash in any of upper,
middle, lower 3-digit displays.
The flow rate exceeds the upper limit of
indicated flow rate range.
If the failure cannot be solved after the above instructions are performed, please contact SMC for investigation.
Displayed if an internal error has
occurred.
Function Details
Series PFMB
16